A micro heat exchanger microfabricated from bulk aluminium

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Scotti, G.^1 ; Franssila, S.^1

Aalto University, Department of Materials Science and Technology, Espoo, Finland^1

关键词: Area density;    Etched surface;    Facile fabrication;    Micro-fluidic devices;    Micro-heat exchangers;    Microfabricated;    Self-adhesive;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012069/pdf
DOI  :  10.1088/1742-6596/557/1/012069

来源: IOP

【 摘 要 】

We report a micro heat exchanger microfabricated from a bulk aluminium alloy substrate. The device is comprised of two 18 cm long microchannels, one on each side of an aluminium chip, capped on both sides with a thin self-adhesive polymer film. In spite of a cheap and facile fabrication method, initial experiments with the device show promising results. Area densities from 25000 m-1to 45000 m-1have been achieved. Compared to our previous work on aluminium microfluidic devices produced with a similar technology but from a different, less pure alloy, in this study the etched surfaces are significantly smoother, and present less photoresist delamination.