Process flow to integrate nanostructures on silicon grass in surface micromachined systems

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Mehner, H.^1 ; Müller, L.^1 ; Biermann, S.^2 ; Hänschke, F.^3 ; Hoffmann, M.^1

Micromechanical Systems Group, IMN MacroNano, Technische Universität Ilmenau, Ilmenau

98693, Germany^1

Micro-Hybrid Electronic GmbH, Hermsdorf

07629, Germany^2

Leibniz-Institut für Photonische Technologien E.V., Jena

07702, Germany^3

关键词: Amorphous silicon layers;    Low temperatures;    Metallic nanostructure;    Micro-machined;    Microstructured silicons;    Optical applications;    Process flows;    Surface micromachining process;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012022/pdf
DOI  :  10.1088/1742-6596/757/1/012022

学科分类：力学，机械学

来源: IOP

【 摘 要 】

The process flow to integrate metallic nanostructures in surface micromachining processes is presented. The nanostructures are generated by evaporation of microstructured silicon grass with metal. The process flow is based on the lift-off of a thin amorphous silicon layer deposited using a CVD process. All steps feature a low temperature load beneath 120 °C and high compatibility with many materials as only well-established chemicals are used. As a result metallic nanostructures usable for optical applications can be generated as part of multilayered microsystems fabricated in surface micromachining.