Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Ayerden, N.P.^1 ; Ghaderi, M.^1 ; Wolffenbuttel, R.F.^1

Faculty of EEMCS, Delft University of Technology, Mekelweg 4, Delft

2628 CD, Netherlands^1

关键词: Absorption spectrometers;    Batch fabrication;    Inclined mirror;    Micro-spectrometer;    Miniaturized devices;    On-chip absorptions;    Optical efficiency;    Wavelength ranges;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012018/pdf
DOI  :  10.1088/1742-6596/757/1/012018

学科分类：力学，机械学

来源: IOP

【 摘 要 】

The increasing demand for small, robust and low-cost gas sensors triggers the batch fabrication of highly selective and sensitive miniaturized devices. A linear variable optical filter (LVOF) based microspectrometer enables selectivity in a wide wavelength range, while maintaining the robustness and low cost. To achieve sensitivity in an LVOF based absorption spectrometer, a long gas cell is required. In this paper, we propose an on-chip absorption path that also serves as a gas cell, where the light beam is steered using 45° inclined mirrors. The fabrication of 45° inclined mirrors is demonstrated and optical efficiency of the system is analyzed using ray tracing.