MEMS Batch Fabrication of the Bipolar Micro Magnet Array for Electromagnetic Vibration Harvester

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Yamaguchi, K.^1 ; Fujita, T.^1 ; Tanaka, Y.^1 ; Takehira, N.^1 ; Sonoda, K.^1 ; Kanda, K.^1 ; Maenaka, K.^1

Department of EECS, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo

671-2280, Japan^1

关键词: Batch fabrication;    Bonding process;    Electromagnetic vibrations;    Energy Harvester;    Magnet array;    Magnetic poles;    Micromagnets;    Monopolar;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012033/pdf
DOI  :  10.1088/1742-6596/557/1/012033

来源: IOP

【 摘 要 】

This article introduces a MEMS batch fabrication process of micro magnet array with bipolar magnetic pole for an electromagnetic vibration energy harvester. In order to obtain the large electromotive force from large magnetic flux density change, we established the fine patterned alternating magnetized bipolar magnetic structure. The batch fabrication process of bipolar magnet array is composed of two wafers processing with S-pole and N-pole magnetization and bonding process. By the prototype fabrication of bipolar magnet with the 200 μm SN-interval, we showed the usability of the batch fabrication process of the bipolar magnet array. In addition, we estimated the generated power of energy harvester with a bipolar magnet array. Compared to a harvester with monopolar magnet array, we showed the good result for bipolar one.