MEMS electrostatic vibration energy harvester without switches and inductive elements

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Dorzhiev, V.^1 ; Karami, A.^2 ; Basset, P.^3 ; Dragunov, V.^1 ; Galayko, D.^2

Department of Semiconductor Devices and Microelectronics, Novosibirsk State Technical University, Novosibirsk, Russia^1

LIP6, UPMC, Sorbonne Universités, France^2

Université Paris-Est, ESYCOM, ESIEE Paris, France^3

关键词: Additional control;    Batch fabrication;    Conditioning circuit;    Electro-mechanical damping;    External vibrations;    Inductive elements;    Vibration energy harvesters;    Voltage increase;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012126/pdf
DOI  :  10.1088/1742-6596/557/1/012126

来源: IOP

【 摘 要 】

The paper is devoted to a novel study of monophase MEMS electrostatic Vibration Energy Harvester (e-VEH) with conditioning circuit based on Bennet's doubler. Unlike the majority of conditioning circuits that charge a power supply, the circuit based on Bennet's doubler is characterized by the absence of switches requiring additional control electronics, and is free from hardly compatible with batch fabrication process inductive elements. Our experiment with a 0.042 cm3batch fabricated MEMS e-VEH shows that a pre-charged capacitor as a power supply causes a voltage increase, followed by a saturation which was not reported before. This saturation is due to the nonlinear dynamics of the system and the electromechanical damping that is typical for MEMS. It has been found that because of that coupled behavior there exists an optimal power supply voltage at which output power is maximum. At 187 Hz / 4 g external vibrations the system is shown to charge a 12 V supply with a output power of 1.8 μW.