会议论文详细信息
27th Micromechanics and Microsystems Europe Workshop | |
Development and fabrication of a very High-g sensor for very high impact applications | |
物理学;力学 | |
Mackowiak, Piotr^1 ; Mukhopadhyay, Biswajit^1 ; Hu, Xiaodong^2 ; Ehrmann, Oswin^1,2 ; Lang, Klaus-Dieter^1,2 ; Linke, Stefan^2 ; Chu, Anthony^3 ; Ngo, Ha-Duong^1,4 | |
Fraunhofer Institute for Reliability and Microintegration, Germany^1 | |
Technische Universität Berlin, Germany^2 | |
TE Connectivity, Switzerland^3 | |
University of Applied Sciences Berlin, Germany^4 | |
关键词: High impact; Piezo-resistive; Silicon on insulator (SOI); | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012016/pdf DOI : 10.1088/1742-6596/757/1/012016 |
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学科分类:力学,机械学 | |
来源: IOP | |
【 摘 要 】
In this paper we present the first time our development work of a family of silicon on insulator (SOI)- based piezoresistive MEMS very high G sensors for measurement of accelerations up to 60.000 g. Two sensors have been realized, one for 20.000g and one for 60.000g.
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