MEMS electrostatic influence machines

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Le, Cuong Phu^1 ; Halvorsen, Einar^1

University College of Southeast Norway, Norway^1

关键词: Charge imbalance;    Electromechanical switches;    Generator design;    Lumped modeling;    Output voltages;    Parasitic capacitance;    Silicon on insulator (SOI);    Voltage difference;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012048/pdf
DOI  :  10.1088/1742-6596/773/1/012048

来源: IOP

【 摘 要 】

This paper analyses the possibility of MEMS electrostatic influence machines using electromechanical switches like the historical predecessors did two centuries ago. We find that a generator design relying entirely on standard silicon-on-insulator(SOI) micromachining is conceivable and analyze its performance by simulations. The concept appears preferable over comparable diode circuits due to its higher maximum energy, faster charging and low precharging voltage. A full electromechanical lumped-model including parasitic capacitances of the switches is built to capture the dynamic of the generator. Simulation results show that the output voltage can be exponentially bootstrapped from a very low precharging voltage so that otherwise inadequately small voltage differences or charge imbalances can be made useful.