Silicon-on-Insulator Nanowire Based Optical Waveguide Biosensors

5th International Conference on Advances in Optoelectronics and Micro/Nano-optics

Li, Mingyu^1 ; Liu, Yong^1 ; Chen, Yangqing^1 ; He, Jian-Jun^1

State Key Laboratory of Modem Optical Instrumentation, Zhejiang University, Hangzhou

310027, China^1

关键词: Biosensing;    Double ring;    High sensitivity;    Label-free molecular detection;    Mach-Zehnder;    Microfluidic channel;    Silicon on insulator (SOI);    Vernier effect;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/680/1/012004/pdf
DOI  :  10.1088/1742-6596/680/1/012004

来源: IOP

【 摘 要 】

Optical waveguide biosensors based on silicon-on-insulator (SOI) nanowire have been developed for label free molecular detection. This paper reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder- ring sensor integrated with microfluidic channels are demonstrated.