Amorphous hydrogenated carbon films. Synthesis, structure and properties

International Workshop on Physical and Chemical Processes in Atomic Systems

Ryaguzov, A.P.^1,3 ; Nemkayeva, R.R.^1,2 ; Alpysbaeva, B.E.^2 ; Aliaskarov, R.K.^2

National Nanotechnological Laboratory Open Type Al-Farabi KazNU, Kazakhstan^1

Laboratory of Engineering Profile Al-Farabi KazNU, Kazakhstan^2

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute), Kashirskoe highway 31, Moscow

115409, Russia^3

关键词: Amorphous hydrogenated carbon films;    Graphite target;    High frequency HF;    RF discharge;    Structural differences;    Structure and properties;    Synthesis conditions;    Temperature and pressures;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/751/1/012027/pdf
DOI  :  10.1088/1742-6596/751/1/012027

来源: IOP

【 摘 要 】

Method of high-frequency ion-plasma (RF) sputtering of graphite target in the atmosphere of argon, methane and hydrogen with various ratios was used to synthesize amorphous hydrogenated carbon films (a-C:H) at low power of RF discharge in wide range of temperature and pressure of gas mixture from 0.5 to 0.9 Pa. Structural analysis by methods of atomic force microscopy and Raman spectroscopy showed significant dependence of films structure on thermodynamic and kinetic parameters of synthesis. Change of optical band gap in the range from 1.4 eV to 2.7 eV confirms considerable structural difference of amorphous carbon films obtained at different synthesis conditions. The influence of hydrogen on formation of structure is shown.