Characteristics of flows of energetic atoms reflected from metal targets during ion bombardment

23rd International Conference on Vacuum Technique and Technology

Kuzmichev, A.^1 ; Perevertaylo, V.^1 ; Tsybulsky, L.^1 ; Volpian, O.^2

National Technical University of Ukraine, Kiev Polytechnic Institute, 37 prospect Pobedy, Kiev

03056, Ukraine^1

Scientific-Manufacturing Enterprise Fotron-Auto Ltd., 8 Novodanilovskaya naberezhnaya, Moscow

117105, Russia^2

关键词: Back-scattered;    Coating deposition;    Energy distributions;    Energy reflection coefficients;    High-energy neutrals;    Ion energies;    Metal target;    Particle numbers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012005/pdf
DOI  :  10.1088/1742-6596/729/1/012005

来源: IOP

【 摘 要 】

Particle number and energy reflection coefficients for energetic neutralized gas ions (Ar and O atoms) backscattered from metal targets during ion bombardment have been calculated using TRIM code. The energy distributions of reflected atoms are computed, too, and their dependence on the primary ion energy and the angle of ion incidence is determined. The obtained data confirm the possibility of employing energetic atoms reflection for generation of high energy neutral beams and point out to take this phenomenon into account under analysis of the ion technology for coating deposition.