Exploring backscattered imaging in low voltage FE-SEM

Electron Microscopy and Analysis Group Conference 2015

Lewis, P.^1 ; Micklethwaite, S.^1 ; Harrington, J.^1 ; Dixon, M.^2 ; Brydson, R.^1 ; Hondow, N.^1

School of Chemical and Process Engineering, University of Leeds, Leeds

LS2 9JT, United Kingdom^1

Hitachi High-Technologies Europe, Maidenhead

SL6 8YA, United Kingdom^2

关键词: And filters;    Back-scattered;    Backscattered SEM;    Complex samples;    Electron energy filtering;    Image contrasts;    Low voltages;    Low-voltage imaging;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/644/1/012019/pdf
DOI  :  10.1088/1742-6596/644/1/012019

来源: IOP

【 摘 要 】

Contrast levels in backscattered SEM images were investigated, utilising stage deceleration for low voltage imaging and also electron energy filtering. Image contrast variations are explained via use of Monte Carlo simulations which can predict the optimum accelerating and filter voltages for imaging complex sample mixtures.