Bottom-up silicon nanowire-based thermoelectric microgenerators

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Dávila, D.^1 ; Huber, R.^1 ; Hierold, C.^1

Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Tannenstrasse 3, Zurich

8092, Switzerland^1

关键词: Micro-fabrication techniques;    Patterned microstructures;    Regrowth process;    Silicon nanowires;    Silicon structures;    Thermo-electric generators;    Vertical devices;    Vertical integration;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012101/pdf
DOI  :  10.1088/1742-6596/660/1/012101

来源: IOP

【 摘 要 】

In this work, bottom-up intrinsic crystalline Si nanowire arrays in combination with top-down microfabrication techniques and a vertical device architecture have been proposed to develop an all-silicon nanostructured thermoelectric generator. To fabricate this device, a suitable vertical integration of Si NWs on patterned microstructures, which define the thermoelectric legs of the generator, has been achieved by bonding top and bottom silicon structures through nanowires. The process has been proven to be a feasible approach that employs a regrowth process of the nanowires for bonding purposes.