Improved thermal isolation of silicon suspended platforms for an all-silicon thermoelectric microgenerator based on large scale integration of Si nanowires as thermoelectric material

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Fonseca, L.^1 ; Donmez, I.^1 ; Salleras, M.^1 ; Calaza, C.^1 ; Gadea, G.^2 ; Santos, J.D.^2 ; Morata, A.^2 ; Tarancon, A.^2

IMB-CNM (CSIC), Campus UAB, Bellaterra

E08193, Spain^1

IREC, Jardins de les Dones de Negre 1, 2a pl., Barcelona

E08930, Spain^2

关键词: Silicon nanowires;    Suspended platforms;    Temperature differences;    Thermal isolation;    Thermo-Electric materials;    Thermoelectric devices;    Thermoelectric micro-generator;    Thin-film dielectrics;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012113/pdf
DOI  :  10.1088/1742-6596/660/1/012113

来源: IOP

【 摘 要 】

Special suspended micro-platforms have been designed as a part of silicon compatible planar thermoelectric microgenerators. Bottom-up grown silicon nanowires are going to bridge in the future such platforms to the surrounding silicon bulk rim. They will act as thermoelectric material thus configuring an all-silicon thermoelectric device. In the new platform design other additional bridging elements (usually auxiliary support silicon beams) are substituted by low conductance thin film dielectric membranes in order to maximize the temperature difference developed between both areas. These membranes follow a sieve-like design that allows fabricating them with a short additional wet anisotropic etch step.