Modification of the cylindrical products outer surface influenced by radial beam of argon ions at automatic mode

12th International Conference on Gas Discharge Plasmas and Their Applications

Valikov, R.A.^1 ; Yashin, A.S.^1 ; Yakutkina, T.V.^1 ; Kalin, B.A.^1 ; Volkov, N.V.^1 ; Krivobokov, V.P.^2 ; Yanin, S.N.^2 ; Asainov, O. Kh^2 ; Yurev, Yu N.^2

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe highway, 31, Moscow

115409, Russia^1

National Research Tomsk Polytechnic University, Lenina avenue, 30, Tomsk

634050, Russia^2

关键词: Active environments;    Automatic mode;    Chemical etching;    Cylindrical products;    Energy spectra;    Film deposition;    Mechanical polishing;    Surface polishing;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/652/1/012068/pdf
DOI  :  10.1088/1742-6596/652/1/012068

来源: IOP

【 摘 要 】

Obtaining surface with high purity and good roughness is important for increasing the corrosion resistance and wear resistance of products working in corrosion-active environment. Installation ILUR-03 with the coaxial ion beam wide energy spectrum source for cleaning, polishing and surface doping of long cylindrical items has been developed. Upgraded installation ILUR-03 provides effective technological defects cleaning (abrasives after mechanical polishing, acid residues after chemical etching, adsorbed gases), surface polishing, film deposition by using magnetrons and surface doping by ion mixing method in one technological cycle.