Development of a cryo-FIB technique for the 3D structural characterization of liquid samples

Electron Microscopy and Analysis Group Conference 2015

Tsuchiya, M.^1 ; Iwahori, T.^2 ; Morikawa, A.^3 ; Sato, T.^3 ; Nagakubo, Y.^3

Hitachi High-technologies Europe GmbH, Europark Fichtenhain A 12, Krefeld

47807, Germany^1

Hitachi High-Tech Science Corp., 36-1 Takenoshita, Oyama-cho, Shizuoka

410-1393, Japan^2

Hitachi High-Technologies Corp., 1040 Ichige, Hitachinaka, Ibaraki

312-0033, Japan^3

关键词: Cryo-transfer;    Dispersants;    Dispersion state;    Fully compatible;    Liquid sample;    Nanometer level;    Structural characterization;    Thick samples;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/644/1/012014/pdf
DOI  :  10.1088/1742-6596/644/1/012014

来源: IOP

【 摘 要 】

The observation of three-dimensional distributions in some liquids or colloids is important, for example in cosmetics, functional paints and a catalyst. Furthermore, there is increasing demand to microscopically investigate the structures inside a liquid colloid, such as the interface of a dispersoid and dispersant. In order to meet these requirements, we have developed a cryo-transfer holder which is fully compatible between FIB and TEM/STEM. The cross section of frozen emulsions and a thin film sample were made by FIB-SEM (NB5000). As a result, the dispersion state of a dispersoid was observed by sequential FIB and SEM. Furthermore a 100nm thick sample was made by FIB and observed by 200 kV STEM (HD- 2700). The dispersoid (TiO2and Fe2O3) morphology and distribution were shown at nanometer level.