Optical characterization of macro-, micro- and nanostructures using polarized light

18th International School on Condensed Matter Physics: "Challenges of Nanoscale Science: Theory, Materials, Applications"

Petrik, P.^1,2 ; Kumar, N.^4 ; Juhasz, G.^1 ; Major, C.^1 ; Fodor, B.^1,3 ; Agocs, E.^1 ; Lohner, T.^1 ; Pereira, S.F.^4 ; Urbach, H.P.^4 ; Fried, M.^1,2

Institute for Technical Physics and Materials Science, Research Centre for Natural Sciences, Konkoly Thege Rd. 29-33, Budapest

1121, Hungary^1

Doctoral School of Molecular- and Nanotechnologies, Faculty of Information Technology, University of Pannonia, Egyetem u. 10, Veszprém

H-8200, Hungary^2

Faculty of Science, University of Pécs, Ifjúság utja 6, Pécs

7624, Hungary^3

Department of Imaging Physics, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, GA Delft

2600, Netherlands^4

关键词: Increasing sensitivities;    Large surfaces;    Micro and nanostructures;    Optical characterization;    Optical Metrology;    Photovoltaic applications;    Photovoltaic panels;    Reflection of light;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/558/1/012008/pdf
DOI  :  10.1088/1742-6596/558/1/012008

来源: IOP

【 摘 要 】

Reflection of light measured in a polarimetric, scatterometric and spectroscopic way allows the measurement of structures in a broad size range from large (meter) scales like photovoltaic panels down to small (nanometer) scales like nanocrystals. Optical metrology continues to be improved to measure those materials with increasing sensitivity and accuracy, typically in a form of thin films on high quality substrates. This review provides an overview of some recently developed or improved methods, e.g. divergent light source ellipsometry for the mapping of large surfaces for photovoltaic applications, Fourier scatterometry for the measurement of periodic structures with sizes comparable to the wavelength of illumination, as well as spectroscopy around the band gap photon energies to characterize nanostructures - without attempting completeness.