Basic Research of Vibration Energy Harvesting Micro Device using Vinylidene Fluoride / Trifluoroethylene Copolymer Thin Film

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Takiguchi, T.^1 ; Sasaki, T.^2 ; Nakajima, T.^2 ; Yamaura, S.^2 ; Sekiguchi, T.^1 ; Shoji, S.^1

Waseda University, Japan^1

Institute for Materials Research, Tohoku University, Japan^2

关键词: C-V characteristic;    Copolymer thin films;    LCR meters;    Micro-device;    Vibration energy harvesting;    Vinylidene fluoride;    Vinylidene fluoride/trifluoroethylene copolymers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012030/pdf
DOI  :  10.1088/1742-6596/557/1/012030

来源: IOP

【 摘 要 】

Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.