Study of sol-gel Cu-doped Al2O3 thin films: structural and optical properties

18th International Summer School on Vacuum, Electron and Ion Technologies

Ivanova, T.^1 ; Harizanova, A.^1 ; Koutzarova, T.^2 ; Vertruyen, B.^3

Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee, 1784 Sofia, Bulgaria^1

Acad. E. Djakov Institute of Electronics, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee, 1784 Sofia, Bulgaria^2

LCIS/SUPRATECS, Institute of Chemistry B6, University of Liege, Sart-Tilman, B-4000 Liege, Belgium^3

关键词: Amorphous and crystalline phasis;    Annealing procedures;    High temperature treatments;    Optical characterization;    Quartz substrate;    Sol-gel deposition;    Structural and optical properties;    UV-vis spectroscopy;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/514/1/012008/pdf
DOI  :  10.1088/1742-6596/514/1/012008

来源: IOP

【 摘 要 】

We present a study of of copper-doped Al2O3films prepared by sol-gel deposition. The films were spin-coated on Si and quartz substrates and a high-temperature treatment was conducted in the range 500-800 °C in oxygen or nitrogen. The impact was followed of the annealing procedures on the AlxCu1-xO3films's properties. XRD was used to determine the films' structure; it revealed a mixture of amorphous and crystalline phases. Optical characterization was performed by UV-VIS spectroscopy. The sol-gel films prepared are very transparent. The band gaps of the Al-Cu-O films were estimated from the optical data, with the values ranging from 3.4 to 4.8 eV depending on the Cu content, the annealing and the gas ambients.