Design, Fabrication and Testing of Silicon-integrated Li-ion Secondary Micro Batteries with Side-by-Side Electrodes

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Hoeppner, Katrin^1 ; Ferch, M.^1 ; Eisenreich, M.^2 ; Marquardt, K.^2 ; Hahn, R.^2 ; MacKowiak, P.^1 ; Mukhopadhyay, B.^2 ; Ngo, H.-D.^2 ; Gernhardt, R.^2 ; Toepper, M.^2 ; Lang, K.-D.^1,2

TU Berlin, Forschungsschwerpunkt Technologien der Mikroperipherik, Gustav-Meyer-Allee 25, 13355 Berlin, Germany^1

Fraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany^2

关键词: Active material;    Cath-ode materials;    E beam evaporation;    Linear capacity;    Lithium cobalt oxides;    Rate capabilities;    Side by sides;    Silicon spacers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012086/pdf
DOI  :  10.1088/1742-6596/476/1/012086

来源: IOP

【 摘 要 】

This paper reports the design, fabrication, and testing of silicon-integrated lithium ion secondary micro batteries with a side-by-side electrode setup. Two cavities separated by a narrow silicon spacer served as a containment for the electrodes and were etched into -Si by wet chemical etching using aqueous KOH solution. The etched silicon battery containment was passivated by a stress-compensated layer of SiO2/Si3N4. Ti/Pt-current collectors were applied by E-beam evaporation and lift-off structuring. A volumetric dispenser served to fill the cavities with slurries of the active materials-lithium cobalt oxide (LiCoO2) as the anode and graphite as the cathode material. Encapsulation, electrolyte filling, and electrochemical characterisation of the finished cells took place in an Ar-filled glove box. The fabricated batteries have shown a rate capability of up to 5C and a linear capacity loss rate of