Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors

11th International Conference on X-ray Microscopy

Matsuyama, S.^1 ; Emi, Y.^1 ; Kohmura, Y.^2 ; Tamasaku, K.^2 ; Yabashi, M.^2 ; Ishikawa, T.^2 ; Yamauchi, K.^1,3

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Osaka 565-0871, Suita, Japan^1

SPring-8, RIKEN, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan^2

Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Osaka 565-0871, Suita, Japan^3

关键词: Chromatic aberration;    Hard X ray;    Kirkpatrick-Baez mirror;    Microscope systems;    Siemens stars;    Spatial resolution;    Total reflection mirrors;    X-ray energies;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/463/1/012017/pdf
DOI  :  10.1088/1742-6596/463/1/012017

来源: IOP

【 摘 要 】

We developed achromatic full-field hard X-ray microscopy on the basis of advanced Kirkpatrick-Baez mirrors consisting of four total-reflection mirrors. The microscope system consists of advanced Kirkpatrick-Baez mirrors as an objective, Kirkpatrick-Baez mirrors as a condenser and an X-ray CCD camera. The performance of the system was investigated using a Siemens star chart with a minimum resolution of 50 nm at BL29XUL of SPring-8 at 10 keV. As a result, a spatial resolution of ∼150 nm was achieved. Also, no chromatic aberration was confirmed by taking images at an X-ray energy from 8 to 11.5 keV.