Development of high-accuracy X-ray ptychography apparatus

11th International Conference on X-ray Microscopy

Suzuki, Akihiro^1 ; Senba, Yasunori^2 ; Ohashi, Haruhiko^2 ; Kohmura, Yoshiki^3 ; Yamauchi, Kazuto^1 ; Ishikawa, Tetsuya^3 ; Takahashi, Yukio^1

Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Osaka 565-0871, Suita, Japan^1

Japan Synchrotron Radiation Research Institute, SPring-8, 1-1-1 Kouto, Sayo, Hyogo, 679-5198, Japan^2

RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo, 679-5148, Japan^3

关键词: Constant temperature;    Drift compensation;    High-accuracy;    Internal structure;    Kirkpatrick-Baez mirror;    Non-isolated;    Reconstructed image;    Temperature changes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/463/1/012039/pdf
DOI  :  10.1088/1742-6596/463/1/012039

来源: IOP

【 摘 要 】

X-ray ptychography allows us to observe the internal structures of non-isolated objects without lenses. We developed a high-accuracy X-ray ptychography apparatus equipped with Kirkpatrick-Baez mirrors. The full width at half-maximum of the focal profiles was ∼600 nm for the vertical and horizontal directions. The estimated flux was ∼3×107photons/s. We also developed a constant-temperature system to suppress sample and/or beam drift during measurements. The temperature change of the apparatus was controlled to less than 0.04 °C over 10 hours. The total amount of drift over 10 hours was suppressed to less than 500 nm. By using both the constant-temperature system and a drift compensation method, the reconstructed image of the test object was markedly improved.