Development of mathematical models for calculating statics and dynamics of membrane sensitive elements of microelectromechanical control systems

International Conference on Mechanical Engineering, Automation and Control Systems 2018

Bibikov, S.V.^1 ; Kalinkina, M.E.^1 ; Kozlov, A.S.^1 ; Korobeynikov, A.G.^1 ; Labkovskaia, R.I.^1 ; Pirozhnikova, O.I.^1 ; Tkalich, V.L.^1

St. Petersburg National Research University of Information Technologies, Mechanics and Optics, 49, Kronverksky Ave., St. Petersburg

197101, Russia^1

关键词: Analysis of various;    Engineering calculation;    Experimental values;    Micro-electro-mechanical;    Static deformations;    Statics and dynamics;    Stress strain state;    Theoretical calculations;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/560/1/012022/pdf
DOI  :  10.1088/1757-899X/560/1/012022

来源: IOP

【 摘 要 】

The article is devoted to the development of mathematical models for calculating the statics and dynamics of membrane sensitive elements of microelectromechanical control systems. The nonlinear analysis of membrane sensitive elements and the finite element method are considered. The analysis of various options for membrane elastic sensitive elements of pressure sensors and their theoretical models. The method of numerical simulation, the method of linear analysis of static deformation and the comparison of the results of a theoretical calculation of the deformation profiles with experimental values are used. A method for calculating statics and dynamics, membrane and beam microelectromechanical control systems provides a high degree of adequacy with real stress-strain states in the structures of membrane and beam elastic microelectromechanical control systems, as well as reducing the complexity of engineering calculations.