Effectiveness of BaTiO3 dielectric patches on YBa2Cu3O7 thin films for MEM switches

11th European Conference on Applied Superconductivity

Vargas, J.^1 ; Hijazi, Y.^1 ; Noel, J.^2 ; Vlasov, Y.^3 ; Larkins, G.^3

Department of Electrical Engineering, Universidad Del Turabo, PO Box 3030, Gurabo

PR

00778, United States^1

Department of Electrical Engineering, Universidad de Ingenieria y Tecnologia, Lima 33, Peru^2

Department of Electrical Engineering, Florida International University, Miami

FL

33199, United States^3

关键词: Characterization techniques;    Cryogenic temperatures;    Distributed satellites;    Functional switching;    Micro-electro-mechanical;    rf-Magnetron sputtering;    Sputtering pressures;    Superconducting microstrips;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/507/4/042045/pdf
DOI  :  10.1088/1742-6596/507/4/042045

来源: IOP

【 摘 要 】

A micro-electro-mechanical (MEM) switch built on a superconducting microstrip filter will be utilized to investigate BaTiO3dielectric patches for functional switching points of contact. Actuation voltage resulting from the MEM switch provokes static friction between the bridge membrane and BaTiO3insulation layer. The dielectric patch crystal structure and roughness affect the ability of repetitively switching cycles and lifetime. A series of experiments have been performed using different deposition methods and RF magnetron sputtering was found to be the best deposition process for the BaTiO3layer. The effect examination of surface morphology will be presented using characterization techniques as x-ray diffraction, SEM and AFM for an optimum switching device. The thin film is made of YBa2Cu3O7deposited on LaAlO3substrate by pulsed laser deposition. For this work, the dielectric material sputtering pressure is set at 9.5×10-6Torr. The argon gas is released through a mass-flow controller to purge the system prior to deposition. RF power is 85 W at a distance of 9 cm. The behavior of Au membranes built on ultimate BaTiO3patches will be shown as part of the results. These novel surface patterns will in turn be used in modelling other RF MEM switch devices such as distributed-satellite communication system operating at cryogenic temperatures.