Investigation of the surface layer thickness uniformity at the magnetron sputtering depending on the geometry of the flow

Fourth interdisciplinary scientific forum with international participation "New materials and promising technologies"

Nasakina, E.O.^1 ; Sudarchikova, M.A.^1 ; Sprygin, G.S.^1 ; Baskakova, M.I.^1 ; Fedyuk, I.M.^1 ; Bespamiatnova, A.^1 ; Danilova, E.A.^1 ; Konushkin, S.V.^1 ; Leonov, A.V.^1 ; Sevostyanov, M.A.^1 ; Kolmakov, A.G.^1

Baikov Institute of Metallurgy and Material Sciences, 49 Leninsky Avenue, Moscow, Russia^1

关键词: Atomic emission spectrometry;    Auger electron spectrometry;    High-adhesion;    Inhomogeneities;    Layered composites;    Surface layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/525/1/012062/pdf
DOI  :  10.1088/1757-899X/525/1/012062

来源: IOP

【 摘 要 】

The processes of formation of Ti surface layers by magnetron sputtering depending on the geometry of the flow for the subsequent creation of a layered composite are studied. The structure and composition of the resulting layered composite materials were determined using SEM, atomic emission spectrometry and Auger electron spectrometry. The correspondence of morphology of new surfaces and the substrate itself is noted. High adhesion of the components is supposed. The inhomogeneity of the sprayed stream was noted, the main sputtering zone of the target was identified. The gradient of the distribution of the surface layer thickness within the limits of the most intense flux is found, depending on the angle of its incidence on the substrate.