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1 Cesium Neutral Beam and Surface Oxidation Effects on SIMS Analysis at Surface of Silicon [学位论文]

作者:Penley, Christopher R;Dieter P. Griffis , Committee Member,Phillip E. Russell, Committee Member,John M. Mackenzie, Committee Member,J. Michael Rigsbee, Committee Chair,Penley, Christopher R;Dieter P. Griffis;等   

论文开放时间:2008

关键词:Phosphorus;Silicon;...

培养单位:University:North Carolina State University

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