Cesium Neutral Beam and Surface Oxidation Effects on SIMS Analysis at Surface of Silicon

Phosphorus;Silicon;Cesium;Implant;Semiconductor;Secondary Ion Mass Spectrometry;SIMS

Penley, Christopher R ; Dieter P. Griffis , Committee Member,Phillip E. Russell, Committee Member,John M. Mackenzie, Committee Member,J. Michael Rigsbee, Committee Chair,Penley, Christopher R ; Dieter P. Griffis ; Committee Member ; Phillip E. Russell ; Committee Member ; John M. Mackenzie ; Committee Member ; J. Michael Rigsbee ; Committee Chair

University:North Carolina State University

关键词: Phosphorus;    Silicon;    Cesium;    Implant;    Semiconductor;    Secondary Ion Mass Spectrometry;    SIMS;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/2716/etd.pdf?sequence=1&isAllowed=y

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