来源:Materials , 2010
作者:Di Liang, Gunther Roelkens, Roel Baets
关键词:hybrid integration;wafer bonding;...
使用许可:CC BY
来源:Photonics , 2015
作者:Yiheng Qin, Matiar M.R. Howlader
关键词:hybrid integration;low-temperature bonding;...
使用许可:CC BY
来源:Micromachines , 2014
作者:Peter Dannberg;Frank Wippermann;Andreas Br࿌kner;等
关键词:fabrication techniques;lithography;...
使用许可:CC BY