来源:InfoMat , 2020
作者:Ruiqi Yang;Xiheng Lu;Shu Zhang;等
关键词:chemical vapor deposition;electronics;...
使用许可:Unknown
来源:InfoMat , 2020
作者:Judith L. MacManus‐Driscoll;Armin Barthel;Mari Napari;等
关键词:atomic layer deposition;chemical vapor deposition;...
使用许可:Unknown