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1 The effect of thickness and loading force on wear behavior of HfO2 [会议论文]

作者:He, B.-C.^1;Fu, W.-E.^1;Chang, Y.-Q.^1;等

关键词:Annealing condition;Annealing treatments;...

会议举办机构:Centers for Measurement Standards, Industrial Technology Research Institute, No.321, Sec.2, Kuangfu Rd., Hsinchu, 30011, Taiwan^1

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