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1 Formation of dielectric silicon compounds by reactive magnetron sputtering [会议论文]

作者:Veselov, D.S.^1, Voronov, Yu A.^1

关键词:Accumulated charge;Mid-frequencies;...

会议举办机构:National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, 31 Kashirskoe highway, Moscow

会议时间:2016

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