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  • × 2nd International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies
  • × Sensitive layers
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1 Temperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors [会议论文]

作者:Veselov, D.S.^1, Voronov, Y.A.^1

关键词:Dielectric membranes;Heat value;...

会议举办机构:Micro - and Nanoelectronics Department, National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe shosse 31, Moscow

会议时间:2019

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