作者:Khrushchov, M.^1;Levin, I.^1,2;Marchenko, E.^1;等
关键词:Comprehensive research;Deposition technology;...
会议举办机构:Institute of Machine Studies, Russian Academy of Sciences, Moscow
会议时间:2016
作者:Khrushchov, M.^1;Levin, I.^1,2;Marchenko, E.^1;等
关键词:Comprehensive research;Deposition technology;...
会议举办机构:Institute of Machine Studies, Russian Academy of Sciences, Moscow
会议时间:2016