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1 Design of A New Structure Quartz MEMS Gyroscope with High Sensitivity [会议论文]

作者:Zhang, Qingyuan^1;Feng, Lihui^1;Cui, Jianmin^1;等

关键词:Ansys finite elements;Charge signals;...

会议举办机构:School of Optics and Photonics, Beijing Institute of Technology, NO. 5 South Street, Zhongguancun, Haidian District, Beijing, China^1

会议时间:2018

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