Design of A New Structure Quartz MEMS Gyroscope with High Sensitivity

2018 International Conference on Advanced Materials, Intelligent Manufacturing and Automation

材料科学;机械制造;运输工程

Zhang, Qingyuan^1 ; Feng, Lihui^1 ; Cui, Jianmin^1 ; Tang, Yi^2 ; Yao, Yanqing^2

School of Optics and Photonics, Beijing Institute of Technology, NO. 5 South Street, Zhongguancun, Haidian District, Beijing, China^1

Beijing Chenjing Electronics Co. Ltd, Jiuxianqiao, Chaoyang District, Beijing, China^2

关键词: Ansys finite elements;    Charge signals;    Field detections;    Frequency differences;    High sensitivity;    MEMS gyroscope;    Quartz tuning fork gyroscopes;    Strong electric fields;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/382/4/042036/pdf
DOI  :  10.1088/1757-899X/382/4/042036

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

This paper proposes a new structure of quartz MEMS gyroscope. Compared with the traditional double-ended quartz gyroscope, the grooves are symmetrically arranged in the sense tuning forks of new gyroscope, and the two pairs of extra electrodes are added on the grooves. The extra symmetrical sense electrodes can increase the strong electric field, and the increased area of sense electrodes is beneficial to detect charge signals. The ANSYS finite element software is used to simulate the designed structure. The influence of frequency difference is analyzed by modal type, and the parameters of quartz tuning fork gyroscope are optimized to find the suitable structure, the frequency difference of the gyroscope is 203.42Hz. At the same time, the sensitivity is analyzed by harmonic type. The results show that the increasing of the area electrode is efficient, the efficiency of electric field detection is enhanced. The sensitivity of the quartz MEMS gyroscope is increased by more than 15%.