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1 Design, Modeling and Analysis of a XY Nanopositioning Stage for High Speed Scanning [会议论文]

作者:Lin, Shenglong^1, Zhang, Xianmin^1, Zhu, Benliang^1

关键词:Analytical results;Cross-couplings;...

会议举办机构:Guangdong Province Key Laboratory of Precision Equipment and Manufacturing Technology, South China University of Technology, Guangdong Guangzhou

会议时间:

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