- 已选条件:
-
× Pulsed magnetron sputtering
全选
【符合条件的数据共:2条】
作者:Ivanova, A.V.^1;Dorofeeva, T.I.^2;Kalashnikov, M.P.^1^2;等
关键词:Elastic properties;Glass substrates;...
会议举办机构:Tomsk Polytechnic University, 30 Lenina ave., Tomsk
会议时间:2019
作者:Ozimek, M.^1,2, Wilczyski, W.^3, Szubzda, B.^1
关键词:Film thickness distribution;Magnetron sputtering process;...
会议举办机构:Electrotechnical Institute Division of Electrotechnology and Materials Science, Wroclaw, Poland^1
会议时间:2016