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1 Numerical Study of Heating Structure in Cold-Wall MOCVD Reactor by Induction Heating [会议论文]

作者:Zhao, Lili^1;Li, Zhiming^1;Zhang, Jincheng^2;等

关键词:Growth of thin films;Heating conditions;...

会议举办机构:Shandong Provincial Key Laboratory of Network Based Intelligent Computing, School of Information Science and Engineering, University of Jinan, Jinan, China^1

会议时间:2019

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2 Separation of stress-free AlN/SiC thin films from Si substrate [会议论文]

作者:Redkov, A.V.^1,2;Osipov, A.V.^1,2,3;Mukhin, I.S.^1,3;等

关键词:Chemical etching;Coefficients of thermal expansions;...

会议举办机构:St. Petersburg Academic University, St. Petersburg

会议时间:2016

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