1 Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films [会议论文]
作者:Kiseleva, D.V.^1;Yurjev, Y.N.^1;Petrakov, Y.V.^1;等
关键词:Fourier transform infrared;Magnetron power;...
会议举办机构:Department of Experimental Physics, National Research Tomsk Polytechnic University, Tomsk
会议时间:2017
作者:Aksenova, Iu^1;Bashkirtsev, D.^1;Prokopenko, A.^1;等
关键词:Coordination complex;Different structure;...
会议举办机构:Laboratory of Photophysics and Photochemistry of Molecules, Tomsk State University, Tomsk
会议时间:2016