High-Rate Diamond Deposition by Microwave Plasma CVD

High rate growth;Diamond;Deposition

Li, Xianglin ; Zlatko Sitar, Committee Chair,Ramon Collazo, Committee Member,Gerd Duscher, Committee Member,Carl Osburn, Committee Member,Li, Xianglin ; Zlatko Sitar ; Committee Chair ; Ramon Collazo ; Committee Member ; Gerd Duscher ; Committee Member ; Carl Osburn ; Committee Member

University:North Carolina State University

关键词: High rate growth;    Diamond;    Deposition;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/4343/etd.pdf?sequence=1&isAllowed=y

美国|英语

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