Ultraviolet Detectors and Focal Plane Array Imagers Based on AlxGa1-xN P-I-N Photodiodes

UV detector;UV focal plane array;UV digital camera;UV photodiode

Long, Joseph Preston ; Dr. John Muth, Committee Member,Dr. Robert Nemanich, Committee Member,Dr. Jan Schetzina, Committee Chair,Long, Joseph Preston ; Dr. John Muth ; Committee Member ; Dr. Robert Nemanich ; Committee Member ; Dr. Jan Schetzina ; Committee Chair

University:North Carolina State University

关键词: UV detector;    UV focal plane array;    UV digital camera;    UV photodiode;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/731/etd.pdf?sequence=1&isAllowed=y

美国|英语

来源: null

【 摘 要 】

This researchhasbeen conductedin orderto address the absence of effective solid-state ultraviolet (UV) detectors and imagers.Despite the wide range of advances in visible andinfraredimagery, until recently there havebeenno semiconductor devices under development for imaging strictly in the ultraviolet region of the spectrum.Much of the difficulty in creating such devices has been due to the lack of appropriate materials; however,thedevelopmentofthegroupIII-nitrides(III-N),including materialssuchas GaN and AlGaN, has provided a solution to this dilemma.The AlxGa1-xN based devices synthesized during this research were grown via organo-metallic vapor phase epitaxy and processed using standard photolithography, e-beam evaporation, and reactive ion etching processes.Focal plane arrays weresubsequentlybumpbonded to silicon read-out integrated circuits (ROICs), which were then wire bonded to 84-pin leadless chip carriers.Aspecializedvideo camera andfocal planearray evaluation software were used to test the imagers.The devices exhibit very low noise and very high sensitivity to ultraviolet radiation.Excellent quality UVimageshavebeen obtainedfor both 128x128 and 320x256largeformat hybridizedfocal plane arrays.Thesenew devicesmayfind widespread usage in a number of applications that require sensitive UV detectors and UV imagersbut where the cost, size, and power requirements ofa photomultiplier tube cannot be justified.