The transistor laser (TL) o ers advantages over conventional diode laser structure. The TLuses high base doping and minority carrier collection to reduce the recombination lifetimein the active region of the device to <30 ps. A fast recombination lifetime <30 ps reducesthe photon-carrier resonance when modulating the device at RF frequencies. However,the transistor laser with high intrinsic optical speed is limited by more than just internalrecombination lifetime; it is also limited by parasitic resistances and capacitances. Smallsignal bandwidth of 20 GHz and digital modulation of 20 Gbit/s was obtained by reducingor eliminating extrinsic parasitics which limit device performance through the optimizationof device geometry and process conditions.
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Process Development for High Speed Transistor Laser Operation