学位论文详细信息
| The use of a supercritical carbon dioxide-based solvent as a cost effective and environmentally sound alternative to current photoresist stripping solvents | |
| Solvents;Photoresists | |
| Knutson, BrianSorrell, Elbert ; | |
| University of Wisconsin | |
| 关键词: Solvents; Photoresists; | |
| Others : https://minds.wisconsin.edu/bitstream/handle/1793/40511/2002knutsonb.pdf?sequence=1&isAllowed=y | |
| 瑞士|英语 | |
| 来源: University of Wisconsin | |
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| Files | Size | Format | View |
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| The use of a supercritical carbon dioxide-based solvent as a cost effective and environmentally sound alternative to current photoresist stripping solvents | 285KB |  download |
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