Investigation of Multi-Layer Thin Films for Energy Storage.

Renk, T. J. ; Monson, T.

Technical Information Center Oak Ridge Tennessee

关键词: Energy storage;    Multi-layer thin-films;    Investigation;    Energy density;    Capacitor device;   

RP-ID  :  DE2009947371

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

We investigate here the feasibility of increasing the energy density of thin-film capacitors by construction of a multi-layer capacitor device through ablation and redeposition of the capacitor materials using a high-power pulsed ion beam. The deposition experiments were conducted on the RHEPP-1 facility at Sandia National Laboratories. The dielectric capacitor filler material was a composition of Lead- Lanthanum-Zirconium-Titanium oxide (PLZT). The energy storage can be increased by using material of intrinsically high dielectric constant, and constructing many thin layers of this material. For successful device construction, there are a number of challenging requirements including correct stoichiometric and crystallographic composition of the deposited PLZT. This report details some success in satisfying these requirements, even though the attempt at device manufacture was unsuccessful. The conclusion that 900DGC temperatures are necessary to reconstitute the deposited PLZT has implications for future manufacturing capability.