Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation).

Nelson, B.

Technical Information Center Oak Ridge Tennessee

关键词: Solar energy;    Air;    Chemistry;    Deposition;    Kinetics;   

RP-ID  :  DE2008940606

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

The Process Development and Integration Lab (PDIL) Vision is to integrate deposition, characterization, and processing by being flexible and robust; having a standardized transfer interface; and controlled sample ambient between tools. The benefits are: (1) answers to previously inaccessible research questions; (2) control and characterization of critical surfaces (interfaces) and how their impact on subsequent layers; (3) assess process-related source chemistry, surface chemistry and kinetics, and bulk reconstruction; (4) grow layers and alter interfaces using controlled processes and transfer ambients (without exposure to air); (5) develop new techniques, methodologies, device structures, materials, and tools (growth, processing, and analytical); and (6) improved collaborations with university and industry researchers.