Wafer Preparation and Iodine-Ethanol-Ethanol Passivation Procedure for Reproducible Minority-Carrier Lifetime Measurement: Preprint.

Sopori, B. ; Rupnowski, P. ; Appel, J. ; Li, C. ; Johnston, S.

Technical Information Center Oak Ridge Tennessee

关键词: Wafers;    Containers;    Ethanol;    Iodine;    Carrier lifetime;   

RP-ID  :  DE2008929631

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

This paper describes reasons that lifetime measurments may be irreproducible using iodine-in-ethanol (I-E) passivation. Possible factors include the strength of the iodine in ethanol solution, wafer cleaning procedures, influence of wafer container during lifetime measurement, and stability of I-E.