Several Technical Measures to Improve Ultra-High and Extreme-High Vacuum.

Dong, C. ; Mehrotra, P. ; Myneni, G. R.

Technical Information Center Oak Ridge Tennessee

关键词: Vacuum systems;    Silica;    Titanium oxides;    Coatings;    Adsorption;   

RP-ID  :  DE2003807887

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

Achieving UHV/XHV without high temperature bake outs is becoming essential in many applications. In this study, we investigated the use of inexpensive silica and titanium oxide thin film coatings on UHV/XHV chambers/components to reduce the adsorption of water on the chamber walls. Water can be cracked into oxygen and hydrogen in the material and act as one of the sources of the hydrogen. We have also implemented backing of the turbo pump with an ion pump for reducing the vacuum chamber pump down times into UHV/XHV pressure range. The results of these investigations are summarized in the paper.