Assessment of Yttrium Optical Constants in the EUV using Mo/Y Multilayers Designed as Linear Polarizers.

Kjornrattanawanich, B. ; Soufli, R. ; Bajt, S. ; Windt, D. L. ; Seely, J. F.

Technical Information Center Oak Ridge Tennessee

关键词: Yttrium;    Optical constants;    Polarization;    Films;    Synchrotron radiation;   

RP-ID  :  DE200515014553

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

We have produced and characterized Mo/Y multilayers designed as linear-polarizers. By depositing these films directly onto silicon photodiodes, we are able to measure both reflectance and transmittance in the EUV using synchrotron radiation. These measurements have been used to access the accuracy of yttrium optical constants in this wavelength range. We describe our experimental results and discuss the prospects for the future development of efficient EUV polarization elements.