Intrinsic residual stresses in metal films synthesized by energetic particle deposition.

Misra, A. ; Nastasi, M.

Technical Information Center Oak Ridge Tennessee

关键词: Vapor deposited coatings;    Residual stresses;    Metal films;    Deposition;    Lanl;   

RP-ID  :  DE2000762303

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

Residual stresses are intrinsic to all physical vapor deposited coatings. Bombardment with energetic particles (ions or neutrals) has a strong influence on both the sign and the magnitude of intrinsic stresses. For example, stresses can change from large tensile to large compressive with increasing particle bombardment. We develop a model for the evolution of tensile residual stress with increasing bombardment based on the hypothesis that the tensile stresses originate due to the attractive interatomic forces between the coalescing crystallite. The model predictions are shown to compare favorably with experimental results.