A model of current collection in Langmuir probes is used to investigate the effect representative non- equilibrium plasmas under various conditions have on the electron temperature and number density that would be calculated through analysis of the probe collection characteristics. The model uses the distribution function to calculate the charged particle flux to a probe and then, for fixed applied voltages, the current values that satisfy continuity in the probes are determined. The triple probe is not scanned in voltage, so there is no practical way using experimental triple probe data to determine if the plasma is in equilibrium. As a consequence, a triple probe analysis typically relies on the assumption that the plasma is in equilibrium. Proceeding from this point, the numerically-generated non-equilibrium triple probe data are analyzed assuming that the plasma is in equilibrium, with the data compared to the initial distribution function inputs of plasma temperature and number density to determine the effect the non-equilibrium distribution has on plasma measurements. The temperature and number density are both significantly affected when a fraction of the particles in the distribution are shifted from the equilibrium configuration into the non-equilibrium part of the distribution function. For all instances studied, the computed electron temperature and number density are extremely sensitive to small deviations from equilibrium ( ≤ 5% of the plasma shifted into the non-equilibrium function). Shifting more of the plasma into the non-equilibrium distribution beyond this initial level does not produce a significant additional shift in the computed plasma properties.
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