Final-part metrology for LIGA springs, Build Group 1.

Aigeldinger, Georg ; Skala, Dawn M. ; Ceremuga, Joseph T. ; Mills, Bernice E.

Sandia National Laboratories

关键词: Manufacturing.;    Metrology;    Nickel Alloys.;    Liga.;    36 Materials Science;   

DOI  :  10.2172/921133
RP-ID  :  SAND2004-8153
RP-ID  :  AC04-94AL85000
RP-ID  :  921133

美国|英语

来源: UNT Digital Library

【 摘 要 】

The LIGA spring is a recently designed part for defense program applications. The Sandia California LIGA team has produced an initial group build of these nickel alloy parts. These are distinctive in having a macroscopic lateral size of about 1 cm, while requiring microscopic dimensional precision on the order of a few micrometers. LIGA technology capabilities at Sandia are able to manufacture such precise structures. While certain aspects of the LIGA process and its production capabilities have been dimensionally characterized in the past, [1-6] the present work is exclusive in defining a set of methods and techniques to inspect and measure final LIGA nickel alloy parts in large prototype quantities. One hundred percent inspection, meaning that every single LIGA part produced needs to be measured, ensures quality control and customer satisfaction in this prototype production run. After a general visual inspection of the parts and an x-ray check for voids, high precision dimensional metrology tools are employed. The acquired data is analyzed using both in house and commercially available software. Examples of measurements illustrating these new metrology capabilities are presented throughout the report. These examples furthermore emphasize that thorough inspection of every final part is not only essential to characterize but also improve the LIGA manufacturing process.